Towards an optimal contact metal for CNTFETs

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Towards an optimal contact metal for CNTFETs.

Downscaling of the contact length Lc of a side-contacted carbon nanotube field-effect transistor (CNTFET) is challenging because of the rapidly increasing contact resistance as Lc falls below 20-50 nm. If in agreement with existing experimental results, theoretical work might answer the question, which metals yield the lowest CNT-metal contact resistance and what physical mechanisms govern the ...

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ژورنال

عنوان ژورنال: Nanoscale

سال: 2016

ISSN: 2040-3364,2040-3372

DOI: 10.1039/c6nr01012a